Large-Workspace Polyarticulated Micro-Structures Based-On Folded Silica for Tethered Nanorobotics

Origami structures have a wide range of applications in robotics and been intensively investigated by researchers recent years. However, enabling sub-millimeter is an open question especially because the lack small enough joints. In this paper, compliant joints made Silica Focused Ion Beam (FIB) folding are proposed to achieve continuous, highly repeatable large motions. A polyarticulated structure including 3 studied following series robotic analyses experimentations quantify performances. The size firstly appears disruptive smaller than 50 m typical overall length, i.e. less radius optical fiber. Secondly, can planar workspace 57 squared, which significantly compared dimension. Thirdly, repetitive movements performed at randomly selected positions, demonstrate excellent repeatability standard deviations 227 nm 216 x y directions, respectively. These results together state interest novel resulting from FIB as basis for next tethered nanorobotics generation.